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Micro-Nanoscale Device and systems Lab

Learn more about the research and coursework done by faculty and students in micro and nanotechnology-related projects in our MiNDS lab.
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More About the Laboratory

MiNDS courses and related projects are available to all undergraduate technical majors of junior class standing regardless of specific discipline, making the program one of the first efforts to bring the micro technology to a general undergraduate audience.

Since its inception in 2002, the MiNDS program has grown both in size and in scope. Currently multidisciplinary teams of faculty and students are involved in a wide variety of micro and nanoscale technology-related projects and coursework spanning the fields of material science, chemical detection, optics, power generation and bio-micro-electrical-mechanical systems.


The MiNDS program is used for several ongoing research projects within the areas of micro/nanotechnology and pedagogy. Some highlights include:

MEMS Projects

  • Meeting Educational Milestones - Enhancing multidisciplinary undergraduate microelectronic education using a "heads-on" MEMS laboratory experience (NSF grant #0311400)
  • Shape-Memory-Alloy MEMS: Heat engine, energy scavenger and actuation
  • Thin Film Deposition: Improve Reliability of Missile Battery Igniter
  • Microfluidics: Chemistry Lab-on-a-chip
  • Design-Simulation- Characterization
  • MUMPs: Heat actuators and Mirrors

Nanoscale Projects

  • Nanomagnetics: Data Storage
  • Saturable Multiple Quantum Wells: Optical Switching & ADC
  • Carbon Nano-Tubes: Supercapacitor and Energy Storage Application
  • Nano Porous Silica: Water Treatment & Photocatalysis


  • A. Siahmakoun, T. Adams, E. Wheeler, and S. Kirkpatrick, S., "Undergraduate MEMS-Nano Courses for Everyone," Proceedings of MRS 2006 Conference, San Francisco, CA, April 17-21, 2006
  • T. M. Adams, S. R. Kirkpatrick, Z. Wang, and A. Siahmakoun, " NiTi Shape Memory Alloy Thin Films Deposited by Co-Evaporation", Materials Letters, 59 (10), 1161-1164 (2005)
  • Z. Wang, S. R. Kirkpatrick, T. M. Adams, and A. Siahmakoun, " TiNi MEMS Heat Engine", Proceedings of SEM X International Congress & Exposition, Costa Mesa, CA (2004)
  • A. Siahmakoun, S. Kirkpatrick, and T. Adams, "Shaped memory alloy TiNi heat actuator," Nano and Microsystems Technology and Metrology, Redstone Arsenal, AL, Nov. 17-18, 2004
  • T. M. Adams, " An Undergraduate MEMS Course for Everyone" Proceedings of the 2004 American Society for Engineering Education Annual Conference & Exposition, Salt Lake City, UT. (Recipient of Best Paper Award)

Courses in the MiNDS Lab

Two lab-based courses are currently taught in the MiNDS area. Courses are cross-listed in six different academic departments and are open to all Rose students of junior or senior class standing.

Course descriptions PH 410/510, ME 416/516, ECE 416/516, CHE416/516, BE516, CHEM 410 Introduction to MEMS: Fabrication and Applications 3R-3L-4C S Pre: JR or SR standing

Properties of silicon wafers, wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration, simple actuators. Introduction to microfluidic systems. MEMS applications: capacitive accelerometer, cantilever and pressure sensor. Students enrolled in PH510, ME 516, ECE 516, CHE516, BE516 must do project work on a topic selected by the instructor.

PH 411/511, ME 419/519, ECE419/519, CHE419/519, BE519, CHEM 411 Advanced MEMS: Modeling and Packaging 3R-3L-4C F Pre: PH 410 or equivalent course Design process, modeling; analytical and numerical. Actuators; dynamics and thermal issues. Use of software for layout and simulation. Characterization and reliability of MEMS devices. Electrical interfacing and packaging of MEMS. Microsensors, microfluidic systems, applications in engineering, biology, chemistry, and physics. Students enrolled in PH511, ME 519, ECE 519, CHE519, BE519 must do project work on a topic selected by the instructor.

Dr. Azad Siahmakoun

Dr. Azad Siahmakoun

Director of Micro-Nanoscale Devices and Systems (MiNDS) Facilities and Professor of Physics & Optical Engineering

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Contact Us

MiNDS Laboratory
Rose-Hulman Institute of Technology
5500 Wabash Avenue
Terre Haute, IN 47803

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