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Course Descriptions

Engineering Physics at Rose‑Hulman will provide students with a unique opportunity to learn the foundation concepts of physics and make a concentrated study in micro and nano technology. Engineering physicist will be able to apply both scientific and engineering approaches to a wide variety of problems which otherwise is not possible with any traditional engineering or science degree.

EP 507 - Semiconductor Fabrication & Characterization

  • Credit Hours: 2R-6L-4C
  • Term Available: F
  • Graduate Studies Eligible: No
  • Prerequisites: PH 405 or consent of instructor
  • Corequisites: None

Fabrication and characterization of micro/nanoelectronic devices; Semiconductor devices; Oxidation, ion implantation, etching, deposition, lithography, and back-end processing; Process integration of various technologies, including CMOS, double poly bipolar junction transistor, and GaAs MESFET. Process and device simulators illustrate concepts introduced in class. Modern tools/techniques for both bulk- and thin-film characterization; Laboratory is an integral component of this class. Students work in teams to fabricate a multi-junction semiconductor device, using various techniques which include photolithography, diffusion, oxidation, and etching. In-process measurement results are compared with final electrical test results. Circuits are used to carry out performance evaluation. Students must do additional project work on a topic selected by the instructor. Students may not receive credit for both EP 407 and EP 507.

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