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Course Descriptions

Biomedical engineers use science, engineering, and mathematics to understand and solve medical problems. The biomedical engineering program at Rose‑Hulman produces engineers with the medical and biological expertise needed to solve health care problems during careers in technical and health-related industries, as well as in government or industrial laboratories.

BE 516 - Introduction to MEMS: Fabrication & Applications

  • Credit Hours: 3R-3L-4C
  • Term Available: S
  • Graduate Studies Eligible: Yes
  • Prerequisites: JR or SR standing
  • Corequisites: None

Properties of silicon wafers, wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration, simple actuators. Introduction to microfluidic systems. MEMS application: capacitive accelerometer, cantilever and pressure sensor. Students enrolled in BE516 must do project work on a topic selected by the instructor. Cross-listed with CHE 505, ECE 516, EP 510, and ME 516.

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