ME 519 - Advanced MEMS: Modeling & Packaging
- Credit Hours: 3R-3L-4C
- Term Available: F
- Prerequisites: EP 410 - Introduction to MEMS: Fabrication & Applications or equivalent
- Corequisites: None
Design process, modeling; analytical and numerical. Actuators; dynamics and thermal issues. Use of software for layout and simulation. Characterization and reliability of MEMS devices. Electrical interfacing and packaging of MEMS. Microsensors, microfluidic systems, applications in engineering, biology, chemistry, and physics. Cross-listed with ECE 519, EP 511, and CHE 519.