EP 511 - Advanced topics in MEMS
- Credit Hours: 3R-3L-4C
- Term Available: F
- Prerequisites: EP 410 - Introduction to MEMS: Fabrication & Applications or EP 510 - Introduction to MEMS: Fabrication & Applications or consent of instructor
- Corequisites: None
Topics such as: Microlithography. Design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Students must do additional project work on a topic selected by the instructor. Cross-listed with ME 519, ECE 519, and CHE 519.