ECE 519 - Advanced MEMS: Modeling & Packaging
- Credit Hours: 3R-3L-4C
- Term Available: F
- Prerequisites: EP 410 - Introduction to MEMS: Fabrication & Applications or equivalent course
- Corequisites: None
Design process, modeling; analytical and numerical. Actuators; dynamics and thermal issues. Use of software for layout and simulation. Characterization and reliability of MEMS devices. Electrical interfacing and packaging of MEMS. Microsensors, microfluidic systems, applications in engineering, biology, chemistry, and physics. Cross-listed with ME 519, EP 511, and CHE 519.