ECE 419 - Advanced MEMS: Modeling and Packaging
- Credit Hours: 3R-3L-4C
- Term Available: F
- Prerequisites: EP 410 - Introduction to MEMS: Fabrication & Applications or equivalent course
- Corequisites: None
Design process, modeling; analytical and numerical. Actuators; dynamics and thermal issues. Use of software for layout and simulation. Characterization and reliability of MEMS devices. Electrical interfacing and packaging of MEMS. Microsensors, microfluidic systems, applications in engineering, biology, chemistry, and physics. Cross-listed with EP 411, and CHE 419.