Course Description

PH 410/510, ME 416/516, ECE 416/516, CHE416/516, BE516, CHEM 410

Introduction to MEMS: Fabrication and Applications    3R-3L-4C     S       Pre: JR or SR standing

Properties of silicon wafers, wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration, simple actuators. Introduction to microfluidic systems. MEMS applications: capacitive accelerometer, cantilever and pressure sensor.

Students enrolled in PH510, ME 516, ECE 516, CHE516, BE516 must do project work on a topic selected by the instructor.


PH 411/511, ME 419/519, ECE419/519, CHE419/519, BE519, CHEM 411

Advanced MEMS:  Modeling and Packaging     3R-3L-4C           F          Pre: PH 410 or equivalent course

Design process, modeling; analytical and numerical. Actuators; dynamics and thermal issues. Use of software for layout and simulation. Characterization and reliability of MEMS devices. Electrical interfacing and packaging of MEMS.  Microsensors, microfluidic systems, applications in engineering, biology, chemistry, and physics.

Students enrolled in PH511, ME 519, ECE 519, CHE519, BE519 must do project work on a topic selected by the instructor.