PH 410/510, ME 416/516, ECE
416/516, CHE416/516, BE516, CHEM 410
Introduction to MEMS:
Fabrication and Applications 3R-3L-4C S Pre: JR or SR standing
Properties of silicon wafers, wafer-level
processes, surface and bulk micromachining, thin-film deposition, dry and wet
etching, photolithography, process integration, simple actuators. Introduction
to microfluidic systems. MEMS applications: capacitive accelerometer, cantilever
and pressure sensor.
Students enrolled in PH510, ME
516, ECE 516, CHE516, BE516 must do project work on a topic selected by the
instructor.
PH 411/511, ME 419/519, ECE419/519, CHE419/519, BE519, CHEM
411
Advanced MEMS: Modeling and Packaging 3R-3L-4C
F Pre: PH 410 or equivalent course
Design process, modeling;
analytical and numerical. Actuators; dynamics and thermal issues. Use of
software for layout and simulation. Characterization and reliability of MEMS
devices. Electrical interfacing and packaging of MEMS. Microsensors,
microfluidic systems, applications in engineering, biology, chemistry, and
physics.
Students enrolled in PH511, ME
519, ECE 519, CHE519, BE519 must do project work on a topic selected by the
instructor. |