Professors Bunch, Ditteon, Duree, Granieri, Joenathan, E. Kirkpatrick, S. Kirkpatrick, Kirtley, Letfullin, McInerney, Moloney, Siahmakoun, Sirohi, Syed, and Wagner.

NOTE: In courses which include a laboratory, satisfactory completion of the laboratory work is required in order to pass the course.

EP 280 Introduction to Nano-engineering 3.5R-1.5L-4C W Pre: PH113
Scaling laws in small systems, basics of quantum mechanics, nanomaterials and fabrication: examples of zero, one, two, and three dimensional nanostructures, carbon nanotubes, nanomechanics, cantilever oscillation, atomic-force microscope (AFM) and its applications, nano-biotechnology, machinery of cell, and molecular motors.

EP 290 Directed Study Credit arranged Pre: Consent of instructor
Research for freshmen and sophomore students under the direction of a physics or optical engineering faculty member. May earn up to a maximum of 2 credits for meeting the graduation requirements. The student must make arrangements with a faculty member for the research project prior to registering for this course.

EP 380 Nanotechnology, Entrepreneurship and Ethics 3.5R-1.5L-4C S Pre: EP280
Nanoelectronics: basics of solid state physics; electron energy band, semiconductors, tunneling and quantum structures, molecular electronics, nanoscale heat: conduction, convection, and radiation. Nanophotonics in metals and semiconductors, surface Plasmon resonance and applications, photonic bandgap crystals, basics of fluidics, nanoscale fluidics and applications, entrepreneurship and ethics, concepts and tools in innovation and social impacts of nanotechnology.

EP 406 Semiconductor Devices and Fabrication 3R-3L-4C W Pre: PH 405 or ECE 250
Metal-semiconductor interfaces; photoresist and photolithography; thin film deposition; design and fabrication of semiconductor diodes; characterization of process diodes and transistors; MOSFETS; optoelectronic devises and lasers. Laboratory is a design project, the production and characterization of a diode and bipolar transistor. The project is a team exercise. Cross-listed with EP 506.

EP 408 Microsensors 3R-3L-4C S Pre: JR or SR standing, and consent of instructor
Introduction to solid state materials and conventional silicon processing. Measurement of signals from resistance- and capacitance-based transducers; sensor characteristics, calibration and reliability. Examples of microsensors: thermal, radiation, mechanical, chemical, optical fibers, and biological. Cross-listed with EP 508.

EP 410 Introduction to MEMS: Fabrication and Applications 3R-3L-4C S Pre: JR or SR standing
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Cross-listed with ME 416, ECE 416, and CHE405.

EP 411 Advanced topics in MEMS 3R-3L-4C F Pre: EP 410 or equivalent course
Topics such as: Microlithography, design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Cross-listed with ECE 419, and CHE 419.

EP 415 Engineering Physics Projects I 4C S Pre: RH 330 and consent of the instructor
Team-oriented and/or independent design project work on selected topics in any engineering discipline but related to concepts to strengthen both the application and physics and engineering, design of project, building of prototype, experiments to test components and systems, and market analysis. Cross-listed with OE 415.

EP 416 Engineering Physics Projects II 4C F Pre: Consent of the instructor
Follow up course to EP415. To be taken as a sequence from the same department where EP415 was taken. Cross-listed with OE 416.

EP 417 Engineering Physics Projects III 2R-6L-4C W Pre: Consent of the instructor
Follow up course to EP416. To be taken as a sequence from the same department where EP415 and EP416 were taken. Cross-listed with OE 417.

EP 470 Special Topics in Engineering Physics 2-4 Credits Pre: Consent of instructor
Lectures on special topics in engineering physics.

EP 490 Directed Study Credit arranged Pre: Consent of instructor
Research for junior and senior students under the direction of a physics and optical engineering faculty member. May earn up to a maximum of 2 credits for meeting the graduation requirements. The student must make arrangements with a faculty member for the research project prior to registering for this course.

EP 506 Semiconductor Devices and Fabrication 3R-3L-4C W Pre: PH 405 or ECE 250
Metal-semiconductor interfaces; photoresist and photolithography; thin film deposition; design and fabrication of semiconductor diodes; characterization of process diodes and transistors; MOSFETS; optoelectronic devises and lasers. Laboratory is a design project, the production and characterization of a diode, bipolar transistor and MOSFET. The project is a team exercise. Students must do additional project work on a topic selected by the instructor. Cross-listed with EP 406.

EP 508 Microsensors 3R-3L-4C S Pre: JR or SR standing, and consent of instructor
Introduction to solid state materials and conventional silicon processing. Measurement of signals from resistance- and capacitance-based transducers; sensor characteristics, calibration and reliability. Examples of microsensors: thermal, radiation, mechanical, chemical, optical fibers, and biological. Students must do additional project work on a topic selected by the instructor. Cross-listed with EP 408.

EP 510 Introduction to MEMS: Fabrication and Applications 3R-3L-4C S Pre: JR or SR standing
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Students must do additional project work on a topic selected by the instructor. Cross-listed with BE 516, CHE 505, ECE 516, and ME 516.

EP 511 Advanced topics in MEMS 3R-3L-4C F Pre: EP410/510 or consent of instructor
Topics such as: Microlithography. Design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Students must do additional project work on a topic selected by the instructor. Cross-listed with ME 519, ECE 519, and CHE 519.

EP Electives:
Courses from any science or engineering department which are of relevant level to the area concentration. If not in the area concentration, courses should be 300 level or above. It is recommended that students take a sequence of classes from the area concentration. This will fulfill engineering science elective in their engineering curriculum.