Courses

Two lab-based courses are currently taught in the MiNDS area. Courses are cross-listed in six different academic departments and are open to all Rose students of junior or senior class standing.

Over the past few years, an average of 36 students per year have taken the introductory course, 83% of which have been undergraduates. An average of 12 students per year go on to take the advanced course. Eight different academic department have been represented within the courses.

In the future more MiNDS courses will be developed and taught within individual departments.

Course descriptions

PH 410/510, ME 416/516, ECE 416/516, CHE416/516, BE516, CHEM 410
Introduction to MEMS: Fabrication and Applications 3R-3L-4C S Pre: JR or SR
standing

Properties of silicon wafers, wafer-level processes, surface and bulk micromachining,
thin-film deposition, dry and wet etching, photolithography, process integration, simple
actuators. Introduction to microfluidic systems. MEMS applications: capacitive
accelerometer, cantilever and pressure sensor.

Students enrolled in PH510, ME 516, ECE 516, CHE516, BE516 must do project work on
a topic selected by the instructor.

PH 411/511, ME 419/519, ECE419/519, CHE419/519, BE519, CHEM 411
Advanced MEMS: Modeling and Packaging 3R-3L-4C F Pre: PH 410 or equivalent
course

Design process, modeling; analytical and numerical. Actuators; dynamics and thermal
issues. Use of software for layout and simulation. Characterization and reliability of
MEMS devices. Electrical interfacing and packaging of MEMS. Microsensors, microfluidic
systems, applications in engineering, biology, chemistry, and physics.

Students enrolled in PH511, ME 519, ECE 519, CHE519, BE519 must do project work on
a topic selected by the instructor.