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Course Descriptions

Engineering Physics at Rose-Hulman will provide students with a unique opportunity to learn the foundation concepts of physics and make a concentrated study in micro and nano technology. Engineering physicist will be able to apply both scientific and engineering approaches to a wide variety of problems which otherwise is not possible with any traditional engineering or science degree.

EP 510 - Introduction to MEMS: Fabrication & Applications

  • Credit Hours: 3R-3L-4C
  • Term Available: S
  • Prerequisites: Junior or Senior standing
  • Corequisites: None

Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Students must do additional project work on a topic selected by the instructor. Cross-listed with BE 516, CHE 505, ECE 516, and ME 516.