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Course Descriptions

Electrical Engineering (EE) is a professional engineering discipline that deals with the study and application of electricity, electronics and electromagnetism. Common EE tasks include designing communication systems, energy conversion and power delivery, control systems applications, design of analog and digital systems, and others.

ECE 516 - Introduction to MEMS: Fabrication & Applications

  • Credit Hours: 3R-3L-4C
  • Term Available: -
  • Prerequisites: Junior or Senior class standing
  • Corequisites: None

Properties of silicon wafers; wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration, simple actuators. Introduction to microfluidic systems. MEMS applications: capacitive accelerometer, cantilever and pressure sensor. Cross-listed with BE 516, CHE 505, EP 510, and ME 516.