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Course Descriptions

Biomedical engineers use science, engineering, and mathematics to understand and solve medical problems. The biomedical engineering program at Rose-Hulman produces engineers with the medical and biological expertise needed to solve health care problems during careers in technical and health-related industries, as well as in government or industrial laboratories.

BE 516 - Introduction to MEMS: Fabrication & Applications

  • Credit Hours: 3R-3L-4C
  • Term Available: S
  • Prerequisites: JR or SR standing
  • Corequisites: None

Properties of silicon wafers, wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration, simple actuators. Introduction to microfluidic systems. MEMS application: capacitive accelerometer, cantilever and pressure sensor. Students enrolled in BE516 must do project work on a topic selected by the instructor. Cross-listed with CHE 505, ECE 516, EP 510, and ME 516.